JPH078134Y2 - 平面研磨装置 - Google Patents
平面研磨装置Info
- Publication number
- JPH078134Y2 JPH078134Y2 JP1989049214U JP4921489U JPH078134Y2 JP H078134 Y2 JPH078134 Y2 JP H078134Y2 JP 1989049214 U JP1989049214 U JP 1989049214U JP 4921489 U JP4921489 U JP 4921489U JP H078134 Y2 JPH078134 Y2 JP H078134Y2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- polishing
- grindstone
- mounting plate
- bolt insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 41
- 239000007787 solid Substances 0.000 claims description 42
- 238000003780 insertion Methods 0.000 claims description 20
- 230000037431 insertion Effects 0.000 claims description 20
- 239000007788 liquid Substances 0.000 description 16
- 239000002699 waste material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 8
- 239000006061 abrasive grain Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989049214U JPH078134Y2 (ja) | 1989-04-25 | 1989-04-25 | 平面研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989049214U JPH078134Y2 (ja) | 1989-04-25 | 1989-04-25 | 平面研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02139063U JPH02139063U (en]) | 1990-11-20 |
| JPH078134Y2 true JPH078134Y2 (ja) | 1995-03-01 |
Family
ID=31566710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989049214U Expired - Lifetime JPH078134Y2 (ja) | 1989-04-25 | 1989-04-25 | 平面研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH078134Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998017438A1 (en) * | 1996-10-18 | 1998-04-30 | Kanebo Limited | Surface polishing apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2089040A (en) * | 1935-07-05 | 1937-08-03 | Gardner Machine Co | Grinding machine and method of grinding |
| JPS55120979A (en) * | 1979-02-27 | 1980-09-17 | Tdk Corp | Liquid-cooling type grinding wheel |
| JPH0437718Y2 (en]) * | 1985-01-25 | 1992-09-04 | ||
| JPS62107978A (ja) * | 1985-11-07 | 1987-05-19 | Noritake Co Ltd | 湿式研削用部分砥石とその組合せ砥石 |
-
1989
- 1989-04-25 JP JP1989049214U patent/JPH078134Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02139063U (en]) | 1990-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |